JPS6318331B2 - - Google Patents

Info

Publication number
JPS6318331B2
JPS6318331B2 JP53112075A JP11207578A JPS6318331B2 JP S6318331 B2 JPS6318331 B2 JP S6318331B2 JP 53112075 A JP53112075 A JP 53112075A JP 11207578 A JP11207578 A JP 11207578A JP S6318331 B2 JPS6318331 B2 JP S6318331B2
Authority
JP
Japan
Prior art keywords
region
diffusion layer
film
wiring
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53112075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5538084A (en
Inventor
Yoji Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP11207578A priority Critical patent/JPS5538084A/ja
Publication of JPS5538084A publication Critical patent/JPS5538084A/ja
Publication of JPS6318331B2 publication Critical patent/JPS6318331B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11207578A 1978-09-11 1978-09-11 Semiconductor integrated circuit device Granted JPS5538084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11207578A JPS5538084A (en) 1978-09-11 1978-09-11 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11207578A JPS5538084A (en) 1978-09-11 1978-09-11 Semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS5538084A JPS5538084A (en) 1980-03-17
JPS6318331B2 true JPS6318331B2 (en]) 1988-04-18

Family

ID=14577437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11207578A Granted JPS5538084A (en) 1978-09-11 1978-09-11 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5538084A (en])

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL173110C (nl) * 1971-03-17 1983-12-01 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een uit ten minste twee deellagen van verschillend materiaal samengestelde maskeringslaag wordt aangebracht.
JPS4990885A (en]) * 1972-12-28 1974-08-30
GB1437112A (en) * 1973-09-07 1976-05-26 Mullard Ltd Semiconductor device manufacture
JPS598065B2 (ja) * 1976-01-30 1984-02-22 松下電子工業株式会社 Ｍｏｓ集積回路の製造方法

Also Published As

Publication number Publication date
JPS5538084A (en) 1980-03-17

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